PFPE Vacuum Pump Oils Topda K-L Grades are perfluorinated polyether inert fluids with only carbon (C), fluorine(F), and oxygen(O) atoms on the molecular chain. They are ideal for use in vacuum pumps as sealing & lubricating fluid and working fluids especially in the systems which are exposed to strongly oxidative substances like oxygen, ozone or nitric oxides as well as highly reactive substances like halogens and hydrogen halides. Because of their high stability and safety, especially the high reliability of working under particularly harsh conditions, no working medium can be comparable to perfluoropolyether oil in such harsh environment.
Properties | Units | K-L 606 | K-L 1406 | K-L 1606 | K-L 2506 |
---|---|---|---|---|---|
Equivalent Product | Fomblin Y LVAC 06/6 | Fomblin Y LVAC 14/6 | Fomblin Y LVAC 16/6 | Fomblin Y LVAC 25/6 | |
Average Molecular Weight | a.m.u. | 2,400 | 3,500 | 4,300 | 4,600 |
Density at 20°C | g/cm3 | 1.88 | 1.89 | 1.89 | 1.90 |
at 50°C | g/cm3 | 1.82 | 1.83 | 1.83 | 1.84 |
at 100°C | g/cm3 | 1.73 | 1.74 | 1.74 | 1.75 |
at 200°C | g/cm3 | 1.54 | 1.55 | 1.55 | 1.56 |
Viscosity at 20°C | mm2/s | 62 | 142 | 175 | 261 |
at 50°C | mm2/s | 16 | 32 | 37 | 53 |
at 100°C | mm2/s | 4.4 | 7.2 | 8 | 11 |
at 200°C | mm2/s | 1.2 | 1.7 | 1.8 | 2.2 |
Viscosity Index | 71 | 97 | 110 | 113 | |
Vapor Pressure at 20°C | torr | 4×10-7 | 2×10-7 | 5×10-9 | 1×10-7 |
at 50°C | torr | 1×10-5 | 3×10-6 | 2×10-7 | 1×10-6 |
at 100°C | torr | 1×10-3 | 1×10-4 | 2×10-5 | 3×10-5 |
at 200°C | torr | 5×10-1 | 1×10-2 | 1×10-2 | 2×10-3 |
Pour Point | °C | -60 | -54 | -40 | -48 |
Boiling Range, 10% | °C | 160 | 200 | 210 | 200 |
Boiling Range, 90% | °C | 220 | 280 | 280 | 300 |
Heat of vaporization at 150~250°C | cal/g | 9 | 7 | 7 | 6 |
Volatility (149°C/22hr) | % | 6 | 1 | 0.1 | 0.5 |
(204°C/22hr) | % | 35 | 3 | 8.9 | Nil |
Surface Tension at 20°C | dyne/cm | 17 | 18 | 18 | 19 |
PFPE Vacuum Pump Oil Topda K-H Grades are suggested for applications requiring the highest quality vacuum such as in scanning electron and transmission microscopes, mass spectrometers, particle accelerators, ion implantation, plasma and vapor deposition processes. In addition, it is suggested for pumps handling reactive gases such as UF6, F2, oxygen, ozone and tritium, as the fluid can be used in direct contact with these gases without reaction and fluid degradation.
Properties | Units | K-H 1808 | K-H 2509 | K-H 4009 | K-H 14013 |
---|---|---|---|---|---|
Equivalent Product | Fomblin Y HVAC 140/13 | ||||
Average Molecular Weight | a.m.u. | 2,800 | 3,400 | 4,400 | 7,600 |
Density at 20°C | g/cm3 | 1.89 | 1.90 | 1.91 | 1.92 |
Viscosity at 20°C | cSt | 185 | 285 | 474 | 1400 |
Viscosity Index | 120 | 126 | 129 | 140 | |
Pour Point | °C | -45 | -41 | -38 | -30 |
Refractive Index | (nD20) | 1.300 | 1.301 | 1.304 | 1.304 |
Specific Heat at 20°C | cal/g | 0.24 | 0.24 | 0.24 | 0.24 |
Heat of vaporization at 200°C | cal/g | 9 | 7 | 7 | 5 |
Working Temperature | °C | -45~190 | -40~195 | -38~200 | -30~280 |